Scandium Aluminum Nitride (ScAlN)

Cross-cuts: Photonic Systems
last updated 2026-05-07
Aluminum Nitride (AlN)Aluminum Nitride (A…Electro Optic ModulatorsElectro Optic Modul…PiezoelectricPiezoelectricHafnium Oxide (HfO₂) PhotonicsHafnium Oxide (HfO₂…Scandium …

High-EO + ferroelectric variant of AlN

Physics / mechanism

ScAlN replaces some Al atoms in AlN with Sc, dramatically increasing piezoelectric coefficient (5-10×) and electro-optic coefficient (~5×) versus pure AlN. At Sc fractions above ~30%, ScAlN becomes ferroelectric — which means non-volatile state storage in addition to active modulation. CMOS-fab compatible (Sc sputtering is established).

The killer pitch: ScAlN promises to be an EO material with both BTO-class strength AND CMOS-fab compatibility, sidestepping the integration headache that has slowed BTO. If reproducible at 200/300mm wafer scale, it’s a serious challenger.

Competitive landscape

Research stage. Active groups: Stanford (Brongersma), IBM Zurich, Fraunhofer IAF, Wisconsin (Wang). Several ScAlN-FET + ScAlN-FeMEM publications since 2023 indicate the same materials cross-pollination as photonics — ferroelectric memory researchers and ScAlN-photonic researchers overlap heavily.

Frontier (open questions)

See frontmatter frontier: block.

Related concepts

Frontier questions