CoWoS (TSMC)

last updated 2026-05-04

Physics / mechanism

CoWoS (Chip-on-Wafer-on-Substrate) is TSMC’s mature 2.5D advanced packaging platform. A silicon interposer (passive or active) is fabricated on a standard wafer, then known-good dies—logic, HBM, SerDes chiplets—are flip-chip bonded onto it before dicing and substrate attachment. The interposer provides ultra-fine RDL wiring (≤0.4 µm line/space in CoWoS-S) and microbumps at ~40–55 µm pitch, enabling die-to-die bandwidth densities impossible on organic substrates. HBM3/3E stacks connected via CoWoS deliver ~1.2 TB/s per stack. Interposer sizes have scaled to ~120 mm × 120 mm (reticle-stitched) to accommodate multi-chiplet AI accelerators. CoWoS-R replaces the passive Si interposer with an RDL-only interposer; CoWoS-L embeds a bridge die for heterogeneous integration. TSMC’s CoWoS capacity was ~13,000 wspm in 2023, scaling aggressively under AI demand pressure.

Competitive landscape

PlatformInterposer typeBump pitchKey user
CoWoS-SPassive Si~40 µmNVIDIA H/B series
Intel EMIBSi bridge embedded in organic~55 µmIntel Ponte Vecchio
ASE/Amkor FOCoSFan-out RDL~100–130 µmBroader merchant

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