Lithography

EUV (including high-NA), DUV immersion, e-beam, maskless multi-beam, nanoimprint, photoresists, two-photon polymerisation, xolography. The patterning layer that gates every other layer of semiconductor scaling.

16 concepts in this cluster

Computational Lithography

5 frontier questions

Directed Self-Assembly

3 frontier questions

DUV / Immersion Lithography

1 frontier question

E-Beam Lithography

3 frontier questions

EUV Light Sources

+19 sources in 30d

High-NA EUV Lithography

1 frontier question

Lithography

+17 sources in 30d

Lithography Tools

1 frontier question

Mask Blank Manufacturing

1 frontier question

Maskless Lithography

7 frontier questions

Nanoimprint Lithography

5 frontier questions

Photonic Manufacturing

1 frontier question

Photoresists (incl. EUV resists)

1 frontier question

Two-Photon Polymerization

+15 sources in 30d

X-Ray Lithography

3 frontier questions

Xolography

1 frontier question